Kim Ki | Department Of Materials Engineering Sungkyankwan University

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• 同名の論文著者
• Department Of Materials Engineering Sungkyankwan Universityの論文著者

Department Of Materials Engineering Sungkyankwan University | 論文

• C_4F_8O/O_2/N-based Additive Gases for Silicon Nitride Plasma Enhanced Chemical Vapor Deposition Chamber Cleaning with Low Global Warming Potentials

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