Lee S‐h | Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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概要
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd. | 論文
- Electrical Properties of Crystalline Ta_2O_5 with Ru Electrode
- Electrical Properties of Ru/Ta_2O_5/Ru Capacitor for 1 Giga-Scale DRAMs and Beyond
- The Electrical Properties of Concave-type (Ba,Sr) TiO_3 Capacitors for Advanced Memories
- The Electrical Properties of Concave-type (Ba,Sr) TiO_3 Capacitors for Advanced Memories
- The Electrical Properties of Concave-type (Ba,Sr) TiO_3 Capacitors for Advanced Memories