白井 千尋 | 秋田大学理工学部物質科学科
スポンサーリンク
概要
論文 | ランダム
- Study on quartz multitier mold fabrication using gray scale laser beam lithography (Special issue: Microprocesses and nanotechnology)
- Signal processing using Karhunen-Loeve expansion for wafer focus measurement in lithography (Special issue: Microprocesses and nanotechnology)
- Nanosize patterning with nanoimprint lithography using poly(vinyl alcohol) transfer layer (Special issue: Microprocesses and nanotechnology)
- Dynamics of radical cation of poly(styrene acrylate)-based chemically amplified resist for extreme ultraviolet and electron beam lithography (Special issue: Microprocesses and nanotechnology)
- Application of extreme ultraviolet lithography to test chip fabrication (Special issue: Microprocesses and nanotechnology)