Watanabe Keiko | Dep. Radiat. Emerg. Natl. Inst. Radiol. Sci.
スポンサーリンク
概要
論文 | ランダム
- C-6-3 化学量論的なTaN薄膜の(100)Si上での室温エピタキシャル成長(C-6.電子部品・材料,エレクトロニクス2)
- Target surface oxide layer formed by reactive sputtering of Ti target in Ar+O_2 mixed gas
- Effects of thermal treatment on structure and electrical properties of sputtered Ir-W alloy thin films
- Orientation of metal films deposited by sputtering using Ar/N_2 gas mixtures
- Characterization of Ag oxide thin films prepared by reactive RF sputtering