ARAKAWA EIICHI | The Department of Otolaryngology, Tohoku University School of Medicine

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概要

• ARAKAWA EIICHIの詳細を見る
• 同名の論文著者
• The Department of Otolaryngology, Tohoku University School of Medicineの論文著者

論文 | ランダム

• Hemocompatible Poly(ethylene terephthalate) Polymer Modified via Reactive Plasma Treatment
• Patterning of 25 nm Contact Holes at 90 nm Pitch: Combination of Line/Space Double Exposure Immersion Lithography and Plasma-Assisted Shrink Technology
• Three-Dimensional Atomic-Scale Cellular Model and Feature Profile Evolution during Si Etching in Chlorine-Based Plasmas: Analysis of Profile Anomalies and Surface Roughness
• Impacts of CF+, CF2+, CF3+, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist
• Model for Effects of RF Bias Frequency and Waveform on Si Damaged-Layer Formation during Plasma Etching

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