Yamagishi Haruo | Microwave Solid-State Department, Komukai Works, Toshiba Corporation
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概要
Microwave Solid-State Department, Komukai Works, Toshiba Corporation | 論文
- An/TaN/WN/GaAs Structure Schottky Gate Formation for Self-Aligned GaAs MESFET
- Thermal Oxidation of Sputtered TaN Films and Properties of the Oxidized Films