Marumoto Kenji | Advanced Technology R&D Center, Mitsubishi Electric Corporation, Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan

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• 同名の論文著者
• Advanced Technology R&D Center, Mitsubishi Electric Corporation, Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japanの論文著者

Advanced Technology R&D Center, Mitsubishi Electric Corporation, Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan | 論文

• Highly Selective Removal of Residual Deposited Films and Oxide Hard Masks on Polysilicon Gate Electrodes in Anhydrous HF Gases

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