Inaba Hiroshi | Production Engineering Research Laboratory, Hitachi, Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

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• 同名の論文著者
• Production Engineering Research Laboratory, Hitachi, Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japanの論文著者

Production Engineering Research Laboratory, Hitachi, Ltd., 292, Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan | 論文

• Structural Study of Ultrathin Hydrogenated Amorphous Carbon Films Using Spectroscopic Ellipsometry and Ultraviolet Raman Spectroscopy

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