Tamura Hitoshi | R&D center, Kasado Administrative Division Power & Industrial Systems, Hitachi Ltd., 794 Higashitoyoi, Kudamatsu, Yamaguchi 744-8601, Japan

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• 同名の論文著者
• R&D center, Kasado Administrative Division Power & Industrial Systems, Hitachi Ltd., 794 Higashitoyoi, Kudamatsu, Yamaguchi 744-8601, Japanの論文著者

R&D center, Kasado Administrative Division Power & Industrial Systems, Hitachi Ltd., 794 Higashitoyoi, Kudamatsu, Yamaguchi 744-8601, Japan | 論文

• Energy Control of Incident Ions to the Chamber-Wall by Using Push–Pull Bias (Phase-Controlled Bias) in UHF-ECR Etching System

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